A piezoelectric micropump based on micromachining of silicon

The design and realization of two pumps based on micromachining of silicon are described. The pumps, which are of the reciprocating displacement type, comprise one or two pump chambers, a thin glass pump membrane actuated by a piezoelectric disc and passive silicon check valves to direct the flow. Chambers, channels and valves are realized in a silicon wafer by wet chemical etching. The results of mechanical calculations and simulations show good agreement with the actual behaviour of the pumps. It is possible to design pumps having a specific yield and pressure dependence, and which are fail-safe (the flow is blocked while the pump is switched off)

R.F. planar magnetron sputtered ZnO films I: structural properties

The structural properties of r.f. planar magnetron sputtered ZnO films are studied as a function of deposition parameters: substrate type, substrate temperature, sputter gas pressure, growth rate and sputtering power.\ud \ud These films are applied as piezoelectric transducers in micromechanical sensors and actuators. The electric properties, and consequently the piezoelectric behaviour, depend strongly on the structural properties of the layers.\ud \ud All films are polycrystalline. The individual grains are highly oriented with their crystallographic c axis perpendicular to the substrate. Crystalline substrates such as silicon or SiO2 induce a growth of small grains, a few hundredths of a micron wide and long. Amorphous substrates such as metals or amorphous SiO2 induce a growth of broad columnar grains extending through the film thickness and a few tenths of a micron wide. Trends in density and grain size are in agreement with Thornton's structure zone model

R.F. planar magnetron sputtered ZnO films II: Electrical properties

The electrical properties of r.f. planar magnetron sputtered ZnO films are studied by means of current-voltage, capacitance-voltage and Van der Pauw measurements.\ud \ud These films are applied as piezoelectric transducers in micromechanical sensors and actuators. Their piezoelectric behaviour strongly depends on the electric properties.\ud \ud A conduction model for the polycrystalline ZnO layers is presented. This model gives a good description of the electrical behaviour, and is useful in understanding the piezoelectric properties of the films studied

Optically activated ZnO/Sio2/Si cantilever beams

The photomechanical effect induced by periodically varying sub-bandgap illumination in thin ZnO films deposited on oxidized Si has been demonstrated for the first time. The efficiency of this effect is at least one order of magnitude higher as compared to the photothermal activation of Si. Thus it can be considered as a powerful optical drive for resonant sensors. A phenomenological model of the mechanisms involved in the process is proposed. The optomechanical effect can also be used as a complementary method in determination of the surface state parameters of ZnO films

A thermopneumatic micropump based on micro-engineering techniques

The design, working principle and realization of an electro-thermopneumatic liquid pump based on micro-engineering techniques are described. The pump, which is of the reciprocating displacement type, comprises a pump chamber, a thin silicon pump membrane and two silicon check valves to direct the flow. The dynamic pressure of an amount of gas contained in a cavity, controlled by resistive heating, actuates the pump membrane. The cavity, chambers, channels and valves are realized in silicon wafers by wet chemical etching. Experimental results are presented. Maximum yield and built-up pressure equal 34 ¿l/min and 0.05 atm, at a supply voltage of 6 V. Results of simulations show good agreement with the actual dynamic behaviour of the pump